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Bibliographic Data
Control Number10468
Date and Time of Latest Transaction20130920015208.AM
General Information130920s |||||||||b ||00|||
International Standard Book Number0306671034
Cataloging SourceSTII-DOST
Language Codeeng
Local Call NumberTK3441 S46 M59
Main Entry - Personal NameMilek, John T.
Title StatementSilicon nitride for microelectronic applications [by] John T. Milek
Physical Description2 v. illus. 28 cm
Subject Added Entry - Topical TermMicroelectronics -- Materials
 Silicon nitride
LocationDOST STII TK3441 S46 M59 BOOKS (R) 1004003 1 22315 Volume 3 Part 1 1974-03-05
  
     
 
Physical Location
Department of Science and Technology
Science and Technology Information InstituteTK3441 S46 M59
  
     
 
Digital Copy
Not Available
  
     
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