Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number 76285 Date and Time of Latest Transaction 20110810182922.PM General Information 110810s |||||||||b ||00||| Cataloging Source PCASTRD-DOST Language Code eng Main Entry - Personal Name Shimazu, Michael Title Statement Photonics and semiconductor manufacturing: a natural match Physical Description 82-88 Summary, Etc. Technological advances driven by breakthrough applications of computers constantly pressure chip makers to attain greater levels of integration, higher speeds and smaller feature sizes. The competition in the industry is fierce, making control of manufacturing costs a prime concern. The critical dimensions of next-generation chips can be as low as 0.25 um. The variety of photonic techniques that can be used for precise dimensional measurement makes the marriage of photonics and semiconductors a natural one Subject Added Entry - Topical Term Photonics   Semiconductor industry   Semiconductor inspection           Physical Location           Digital Copy Not Available          Add to Book Cart  |   Download MARC