Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number 79728 Date and Time of Latest Transaction 20110810174725.PM General Information 110810s |||||||||b ||00||| Cataloging Source PCASTRD-DOST Language Code eng Main Entry - Personal Name Hand, Aaron J. Title Statement Light source enables UV lithographies Physical Description 39 Summary, Etc. A laser produced plasma is the current UV light source. It is smaller, simpler and cheaper than existing options Subject Added Entry - Topical Term Laser sources and amplifiers           Physical Location           Digital Copy Not Available          Add to Book Cart  |   Download MARC