Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data 001    79728 005    20110810174725.PM 008    110810s |||||||||b ||00||| 040 ## $aPCASTRD-DOST 041 0# $aeng 100 1# $aHand, Aaron J. 245 00 $aLight source enables UV lithographies 300 ## $a39 520 3# $aA laser produced plasma is the current UV light source. It is smaller, simpler and cheaper than existing options. 650 04 $aLaser sources and amplifiers 991 ## $wANALYTICS           Physical Location           Digital Copy Not Available          Add to Book Cart  |   Download MARC