Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number 76333 Date and Time of Latest Transaction 20110810183016.PM General Information 110810s |||||||||b ||00||| Cataloging Source PCASTRD-DOST Language Code eng Main Entry - Personal Name Levy, Ben Title Statement Putting it together - precisely Physical Description 126-128 Summary, Etc. Researchers now have a new nondustructive method to measure stress levels in aluminum thin-film layers deposited on substrates. Using a seven-axis positioning system from Newport Corp. of Irvine, Calif., they can bounce X-rays off any point on the surface of 8-in. semiconductor wafers and measure the angles of the diffracted rays Subject Added Entry - Topical Term Submicron assembly   Motion system   Electronics   Photonics and electronic equipment   Photonics           Physical Location           Digital Copy Not Available          Add to Book Cart  |   Download MARC