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Control Number76333
Date and Time of Latest Transaction20110810183016.PM
General Information110810s |||||||||b ||00|||
Cataloging SourcePCASTRD-DOST
Language Codeeng
Main Entry - Personal NameLevy, Ben
Title StatementPutting it together - precisely
Physical Description126-128
Summary, Etc.Researchers now have a new nondustructive method to measure stress levels in aluminum thin-film layers deposited on substrates. Using a seven-axis positioning system from Newport Corp. of Irvine, Calif., they can bounce X-rays off any point on the surface of 8-in. semiconductor wafers and measure the angles of the diffracted rays
Subject Added Entry - Topical TermSubmicron assembly
 Motion system
 Photonics and electronic equipment
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