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001
76333
005
20110810183016.PM
008
110810s |||||||||b ||00|||
040
##
$aPCASTRD-DOST
041
0#
$aeng
100
1#
$aLevy, Ben
245
00
$aPutting it together - precisely
300
##
$a126-128
520
3#
$aResearchers now have a new nondustructive method to measure stress levels in aluminum thin-film layers deposited on substrates. Using a seven-axis positioning system from Newport Corp. of Irvine, Calif., they can bounce X-rays off any point on the surface of 8-in. semiconductor wafers and measure the angles of the diffracted rays.
650
04
$aSubmicron assembly
650
04
$aMotion system
650
04
$aElectronics
650
04
$aPhotonics and electronic equipment
650
04
$aPhotonics
991
##
$wANALYTICS
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