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20110810183016.PM
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$aPCASTRD-DOST
041
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$aeng
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$aLevy, Ben
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$aPutting it together - precisely
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$a126-128
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$aResearchers now have a new nondustructive method to measure stress levels in aluminum thin-film layers deposited on substrates. Using a seven-axis positioning system from Newport Corp. of Irvine, Calif., they can bounce X-rays off any point on the surface of 8-in. semiconductor wafers and measure the angles of the diffracted rays.
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$aSubmicron assembly
650
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$aMotion system
650
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$aElectronics
650
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$aPhotonics and electronic equipment
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$aPhotonics
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$wANALYTICS
 
     
 
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