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MARC Record
Bibliographic Data
Control Number
UPD-00000125147
Date and Time of Latest Transaction
20090716212229.0
General Information
080209s1996 ph a 000 eng
Language Code
eng
Local Call Number
LG 995 1996 P51 L82
Main Entry - Personal Name
Lubguban, Jorge A.
Title Statement
Growth of amorphous carbon, diamod-like-carbon and diamond films via plasma-enhanced and hot-filament chemical vapor deposition / Jorge A. Lugbutan, Jr
Physical Description
79 leaves : ill
General Note
Computer print-out
Thesis (M.S.)--University of the Philippines, Diliman
Subject Added Entry - Topical Term
*Chemical vapor deposition
Carbon
Plasma-enhanced chemical deposition
Semiconductor films
Collection Category
FI
UP
Format
Paper
Location
UP DARCHIVES LG 995 1996 P51 L82 Reference [Room Use Only] ARCHIVES-8477T
Textual Physical Form Designator
Book
Physical Location
University of the Philippines
Diliman Main Library: University Archives
LG 995 1996 P51 L82
Digital Copy
Not Available
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