Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number UPD-00000177973 Date and Time of Latest Transaction 20090716222330.0 General Information 070602s1995 nyua b 001 0 eng International Standard Book Number 0442010796 Cataloging Source DENG Local Call Number TK 7836 S58 Main Entry - Personal Name Sivaram, S. Title Statement Chemical vapor deposition : thermal and plasma deposition of electronic materials / S. Sivaram Physical Description xii, 292 p. : ill. ; 24 cm Subject Added Entry - Topical Term Microelectronics industry   Chemical vapor deposition   Microelectronics -- Materials Collection Category FO Format Monograph Location UP DENG-II TK 7836 S58 UDEGB0018929 Regular Circulation E-ESEP-3060 Textual Physical Form Designator Book           Physical Location University of the Philippines Diliman: College of Engineering Library II TK 7836 S58           Digital Copy Not Available          Add to Book Cart  |   Download MARC