Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number UPD-00000177788 Date and Time of Latest Transaction 20090716222133.0 General Information 080209s1994 nyua b 001 0 eng International Standard Book Number 0471005770 Cataloging Source DENG Language Code eng Local Call Number QC 718.5 D9 L54 1994 Main Entry - Personal Name Lieberman, M. A., ( Michael A.) Title Statement Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg Physical Description 572 p General Note "A Wiley-Interscience publication." Subject Added Entry - Topical Term Plasma dynamics   Thin films -- Surfaces   Plasma etching   Plasma chemistry Added Entry - Personal Name Lichtenberg, Allan J. Collection Category FO Format Monograph Location UP DENG QC 718.5 D9 L54 1994 UDEGB0018930 Regular Circulation E-ESEP-2809 Textual Physical Form Designator Book           Physical Location University of the Philippines Diliman: College of Engineering Library I QC 718.5 D9 L54 1994           Digital Copy Not Available          Add to Book Cart  |   Download MARC