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Bibliographic Data
Control Numbernlp00341366
Date and Time of Latest Transaction20091229084244.0
General Information051129s2004 ph 000 0 eng d
System Control Number(elib)nlp00341366
Cataloging SourceNLP
Dewey Decimal Classification NumberThesis 621.38152 F391f 2004
Main Entry - Personal NameFernandez, Marcedon S.
Title StatementFormation of SiH on silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source / by Marcedon S. Fernandez
Physical Descriptionxv, 93 leaves
Subject Added Entry - Topical TermAmorphous semiconductors
 Silane compounds
 Hydrogen ions
 Plasma-enhanced chemical vapor deposition
Textual Physical Form DesignatorThesis
LocationNLP Filipiniana General Book Theses T.M. Kalaw St. Ermita Manila Thesis 621.38152 F391f 2004 ph 59288ftd NLP 395741
  
     
 
Physical Location
National Library of the Philippines
National Library of the Philippines621.38152 / F391f
  
     
 
Digital Copy
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