Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number 79742 Date and Time of Latest Transaction 20110810174711.PM General Information 110810s |||||||||b ||00||| Cataloging Source PCASTRD-DOST Language Code eng Main Entry - Personal Name Hand, Aaron J. Title Statement Photonics will assist next lithography tool Physical Description 92-99 Summary, Etc. It explores the role of photonics in advanced microlithography. Optical lithography has refused to lie down and die, but when its number finally is up, optics will continue to enable whichever technology is chosen to take semiconductor manufacturing into the next generation Subject Added Entry - Topical Term Integrated optics           Physical Location           Digital Copy Not Available          Add to Book Cart  |   Download MARC