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MARC Record
Bibliographic Data
Control Number
77504
Date and Time of Latest Transaction
20110811104003.AM
General Information
110811s |||||||||b ||00|||
Cataloging Source
PCASTRD-DOST
Language Code
eng
Main Entry - Personal Name
Horikoshi, Yoshiji
Yamaguchi, Hiroshi
Title Statement
Step-flow-growth on vicinal GaAs surfaces by migration-enhanced epitaxy
Physical Description
L1456-l1459
Summary, Etc.
The mechanism of step-flow growth on vicinal GaAs substrates during migration-enhanced epitaxy are studied using the reflection high-energy electron diffraction technique. Results show that the low As pressure during migration-enhanced epitaxy growth accelerates step-flow growth. In addition, it is also shown that monolayer terraces composed of surface Ga atoms are formed from step edges during the Ga deposition process. A GaAs/AlAs tilted superlattice is established using this growth technique. X-ray diffraction measurement and transmission electron microscopy observations show that the fabricated structure has periodic composition modulation along the axis tilted from the substrate aximuth
Subject Added Entry - Topical Term
Migration-enhanced epitaxy
Surface migration
Vicinal surface
Tilted superlattice
Physical Location
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