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Control Number77504
Date and Time of Latest Transaction20110811104003.AM
General Information110811s |||||||||b ||00|||
Cataloging SourcePCASTRD-DOST
Language Codeeng
Main Entry - Personal NameHorikoshi, Yoshiji
 Yamaguchi, Hiroshi
Title StatementStep-flow-growth on vicinal GaAs surfaces by migration-enhanced epitaxy
Physical DescriptionL1456-l1459
Summary, Etc.The mechanism of step-flow growth on vicinal GaAs substrates during migration-enhanced epitaxy are studied using the reflection high-energy electron diffraction technique. Results show that the low As pressure during migration-enhanced epitaxy growth accelerates step-flow growth. In addition, it is also shown that monolayer terraces composed of surface Ga atoms are formed from step edges during the Ga deposition process. A GaAs/AlAs tilted superlattice is established using this growth technique. X-ray diffraction measurement and transmission electron microscopy observations show that the fabricated structure has periodic composition modulation along the axis tilted from the substrate aximuth
Subject Added Entry - Topical TermMigration-enhanced epitaxy
 Surface migration
 Vicinal surface
 Tilted superlattice
 
     
 
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