Record Details     « New Search       Brief Record Full Record MARC Record     Bibliographic Data Control Number 77266 Date and Time of Latest Transaction 20110811104459.AM General Information 110811s |||||||||b ||00||| Cataloging Source PCASTRD-DOST Language Code eng Main Entry - Personal Name Shing, Y.H. Title Statement Electron cyclotron resonance deposition and plasma diagnostics of a-Si:H and a-C:H films Physical Description 331-340 Summary, Etc. Electron cyclotron resonance (ECR) microwave plasma enhanced deposition processes have been developed for depositing amorphous silicon (a-Si:H) and amorphous carbon (a-C:H) films. The ECR plasma is generated by a 2.45 GHz microwave power source and a resonant magnetic field in a cyclindrical plasma chamber; the film is then deposited remotely using the extracted ECR plasma through a divergent magnetic field with or without radio frequency power bias. A high deposition rate of about 25 A s-1 and a light-to-dark conductivity ration of 1 X 10 5 for a-Si:H films have been obtained by the ECr process using a pure silane plasma. The methane and silane ECR plasmas used for a-C:H and a-Si:H film depositions are analyzed by optical emission spectroscopy (OES) of SiH* and H* excited states. Steady-state OES studies have established a linear correlation between the SiH* emission intensity and the film deposition rate. This linear correlation suggests that SiH* species are related to the neutral radicals which are responsible for the a-Si:H film deposition. Hard and soft a-C:H films have been deposited by ECR with and without r.f. bias power, respectively. The ECR-deposited a-C:H films have been characterized by fluorescence, IR and Raman spectroscopy. The r.f. bias to the substrate is found to play a critical role in determining the film structure and the carbon bonding configuration of ECR-deposited a-C:H films Subject Added Entry - Topical Term Plasma diagnostic -- Materials science   Microwave plasma -- Material science   Amorphous silicon -- Materials science   Amorphous carbon -- Materials science           Physical Location           Digital Copy Not Available          Add to Book Cart  |   Download MARC