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Bibliographic Data
Control Number13403
Date and Time of Latest Transaction20130920015315.AM
General Information130920s |||||||||b ||00|||
Cataloging SourceSTII-DOST
Language Codeeng
Local Call NumberNE2700.S68
Main Entry - Personal NameRand, Myron J.
 Hughes, Henry G.
Main Entry - Meeting Name2 Symposium on Etching for Pattern Definition (
Title StatementProceedings of the Symposium on Etching for Pattern Definition edited by Henry G. Hughes, Myron J. Rand
Physical Descriptionvi, 203 p. : ill. ; 23 cm
Subject Added Entry - Topical TermSemiconductors -- Etching
 Integrated circuits -- Congresses
 Metals -- Etching
LocationDOST STII NE2700.S68 BOOKS (F) 1000685 1 341 P 1976-10-03
  
     
 
Physical Location
Department of Science and Technology
Science and Technology Information InstituteNE2700.S68
  
     
 
Digital Copy
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