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Amorphous carbon -- Materials science
returned
1
record.
Electron cyclotron resonance deposition and plasma diagnostics of a-Si:H and a-C:H films
.
by
Shing, Y.H.
;
Subject:
Plasma diagnostic -- Materials science
;
Microwave plasma -- Material science
;
Amorphous silicon -- Materials science
;
Amorphous carbon -- Materials science
.
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