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  Search result  Your search for [subject]rf magnetron sputtering returned 2 records.  
 
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  Thesis Growth of indium aluminum nitride films using reactive RF-magnetron sputtering.

by Ceniza, Claude R.; 2012.

Subject: Engineering; Materials science; Sputtering; Indium aluminum nitride films; Collision processes; Generation of ion; Thin film growth process; RF-magnetron sputtering.

  
     
Relevance: 33.35%
 
     
  Analytics <A> new anode-electrode structure for sputter deposition of high-quality Y-Ba-Cu-O thin films.

by Kisu, Takanobu;

Subject: High-quality Y-Ba-Cu-O thin film; rf magnetron sputtering; New anode structure; Reliable synthesis; High jc, smooth surface.

  
     
Relevance: 27.69%
 
     
 
         
         
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