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  Search result  Your search for [author]Ishikawa, Yutaka returned 3 records.  
 
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  Analytics Low-temperature thermal oxidation of silicon in N2O by UV-irradiation.

by Ishikawa, Yutaka;

Subject: Silicon; Thermal oxidation; Low temperature; N2O gas; UV light; AES; C-V characteristics.

  
     
Relevance: 27.15%
 
     
  Analytics <The> enhanced diffusion of low-concentration phosphorus, arsenic and boron in silicon during IR-heating.

by Ishikawa, Yutaka;

Subject: Enhanced diffusion; Phosphorus, arsenic, boron, silicon, IR-heating.

  
     
Relevance: 27.15%
 
     
  Analytics <The> diffusion of Bismuth in silicon.

by Yazaki, Kazuyuki;

Subject: Bismuth; Diffusion; Silicon; concentration profile; Diffusion coefficient; Spin-on.

  
     
Relevance: 16.04%
 
     
 
         
         
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