Search Results       Your search for [subject]Microwave plasma -- Material science returned 1 record.           Electron cyclotron resonance deposition and plasma diagnostics of a-Si:H and a-C:H films. by Shing, Y.H.; Subject: Plasma diagnostic -- Materials science; Microwave plasma -- Material science; Amorphous silicon -- Materials science; Amorphous carbon -- Materials science.          Add to Book Cart Relevance: 26.22%